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Design and Fabrication of Microelectromechanical Devices - Lecture 5

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Lecture 5 - Fabrication for the life sciences

Fabrication for the life sciences; material properties

Prof. Carol Livermore, Prof. Joel Voldman
6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007
(Massachusetts Institute of Technology: MIT OpenCourseWare)
http://ocw.mit.edu
Date accessed: 2009-09-14
License: Creative Commons BY-NC-SA

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