Lectures
- 1. Introduction to MEMS
- 2. Microfabrication for MEMS II
- 3. Microfabrication for MEMS III
- 4. Microfabrication for MEMS IV
- 5. Fabrication for the life sciences
- 6. Elasticity
- 7. Structures
- 8. Lumped-element modeling
- 9. Energy-conserving transducers
- 10. Dynamics
- 11. Structures special topics
- 12. Thermal energy domain
- 13. Modeling dissipative processes
- 14. Fluids 1
- 15. Fluids 2
- 16. Mass transport in liquids
- 17. Feedback
- 18. Noise
- 19. Packaging
- 20. Design problem
- 21. Design tradeoffs
- 22. Power MEMS case study
- 23. Optical MEMS case study
- 24. Capacitive accelerometer case study
- 25. BioMEMS case study
Design and Fabrication of Microelectromechanical Devices - Lecture 24
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Lecture 24 - Capacitive accelerometer case study
Capacitive accelerometer case study (PDF - 1.4 MB)
Prof. Carol Livermore, Prof. Joel Voldman
6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007 (Massachusetts Institute of Technology: MIT OpenCourseWare) http://ocw.mit.edu Date accessed: 2009-09-14 License: Creative Commons BY-NC-SA |
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