Design and Fabrication of Microelectromechanical Devices
Course SummaryThis course is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process.
Reading Material1. Textbook (MIT): Microsystem Design
Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.