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Design and Fabrication of Microelectromechanical Devices

Course Summary

This course is based on 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007 made available by Massachusetts Institute of Technology: MIT OpenCourseWare under the Creative Commons BY-NC-SA license.
This course is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process.

Reading Material

1. Textbook (MIT): Microsystem Design
Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.


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