Lectures
- 1. Introduction - processes and variation framework
- 2. Semiconductor process variation
- 3. Mechanical process variation
- 4. Probability models of manufacturing processes
- 5. Sampling and sampling distributions
- 6. Statistical interference and the Shewhart hypothesis
- 7. SPC methods and process capability
- 8. Advanced SPC: moving average approaches
- 9. Yield modeling and attribute statistics
- 10. Multivariate SPC
- 11. Process causality, analysis of variance and regression analysis
- 12. Full factorial models
- 13. Modeling testing and fractional factorial models
- 14. Fractional factorial models and higher order models
- 15. Quadratic models and response surfaces
- 16. Response surface methods - process robustness
- 17. Nest variance problems
- 18. Sequential experimentation
- 19. Case study 1: Tungsten CVD optimization
- 20. Case study 2: cycle to cycle control
- 21. Case study 3: spatial and temporal RSMs in IC manufacturing
- 22. Case study 4: DOE for multicavity molds
Control of Manufacturing Processes - Lecture 22
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Lecture 22 - Case study 4: DOE for multicavity molds
Case study 4: DOE for multicavity molds (Courtesy of Hayden Taylor. Used with permission.) - 2.4 MB pdf
Prof. Duane Boning, Prof. David Hardt
2.830J / 6.780J / ESD.63J Control of Manufacturing Processes, Spring 2008 (Massachusetts Institute of Technology: MIT OpenCourseWare) http://ocw.mit.edu Date accessed: 2009-08-10 License: Creative Commons BY-NC-SA |
Lecture Material
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