Control of Manufacturing Processes
Course SummaryThis course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
Reading Material1. Textbook: Introduction to Statistical Quality Control
Montgomery, Douglas C. Introduction to Statistical Quality Control. 5th ed. New York, NY: Wiley, 2004. ISBN: 9780471656319.
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2. Textbook: Fundamentals of Semiconductor Manufacturing and Process Control
May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, NJ: Wiley-Interscience, 2006. ISBN: 9780471784067.
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